A metal-semiconductor-metal capacitor with embedded two-dimensional charge is designed and fabricated. Capacitance-Voltage characteristics exhibit switchability with a large voltage sensitivity. Maximum and minimum capacitances outperform previous predictions with potential applicability in RFICs and VLSI for reducing the cross-talk among transmission lines and achievement of higher integrations. The device can replace bulky conductors with its negative capacitance feature. The large light sensitivity in the C-V makes this capacitor an ideal candidate for monolithic microwave-photonic integrated circuits.
A Planar Switchable Capacitor with Embedded Two-Dimensional Electron System for Higher Integrations in VLSI and RFIC
Fabio Quaranta;Adriano Cola;
2012
Abstract
A metal-semiconductor-metal capacitor with embedded two-dimensional charge is designed and fabricated. Capacitance-Voltage characteristics exhibit switchability with a large voltage sensitivity. Maximum and minimum capacitances outperform previous predictions with potential applicability in RFICs and VLSI for reducing the cross-talk among transmission lines and achievement of higher integrations. The device can replace bulky conductors with its negative capacitance feature. The large light sensitivity in the C-V makes this capacitor an ideal candidate for monolithic microwave-photonic integrated circuits.File in questo prodotto:
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