Digital holography is employed as non-contact metrological tool for inspection and characterization of a micromechanical shunt switch for microwave applications. The switch is based on a bridge that is actuated via an electrostatic force generated by a DC voltage signal applied between the bridge and the underneath region. The out-of-plane deformation of the bridge has been investigated during the operational conditions in order to measure the warp in the bridge occurring during its actuation. The results reported in this paper are obtained biasing the RF-MEMS with a voltage ramp with a period of 1s and an amplitude of 30 V. Digital Holography allowed to diagnostic and measure an asymmetric deformation of the device during its actuation.
Analysis of the Actuation of an RF-MEMS by Means of Digital Holography
Coppola Giuseppe;De Nicola Sergio;Finizio Andrea;Ferraro Pietro
2009
Abstract
Digital holography is employed as non-contact metrological tool for inspection and characterization of a micromechanical shunt switch for microwave applications. The switch is based on a bridge that is actuated via an electrostatic force generated by a DC voltage signal applied between the bridge and the underneath region. The out-of-plane deformation of the bridge has been investigated during the operational conditions in order to measure the warp in the bridge occurring during its actuation. The results reported in this paper are obtained biasing the RF-MEMS with a voltage ramp with a period of 1s and an amplitude of 30 V. Digital Holography allowed to diagnostic and measure an asymmetric deformation of the device during its actuation.I documenti in IRIS sono protetti da copyright e tutti i diritti sono riservati, salvo diversa indicazione.
