We have designed and fabricated a toolbox to perform S21 (transmission) measurements by using the Agilent 5600 LS AFM (SMM). In this type of measurement, an additional microwave emitter is located below the sample and the nano-scale probe of the SMM system (the tip) is located on the sample surface (or in close proximity) working as receiver of the transmitted wave. This set up allows to study the electromagnetic properties of the material under test obtained through the measurement of the S21 parameter by means of a two port VNA setup. Advanced microwave modelling software is used to study the measurement sensitivity, dynamic range, and other system characteristics like sub-surface depth resolution.

Deliverable 1.3 del Work Package 1 Progetto FP7 VSMMART Nano

Marcelli Romolo;Proietti Emanuela;Andrea Lucibello;
2013

Abstract

We have designed and fabricated a toolbox to perform S21 (transmission) measurements by using the Agilent 5600 LS AFM (SMM). In this type of measurement, an additional microwave emitter is located below the sample and the nano-scale probe of the SMM system (the tip) is located on the sample surface (or in close proximity) working as receiver of the transmitted wave. This set up allows to study the electromagnetic properties of the material under test obtained through the measurement of the S21 parameter by means of a two port VNA setup. Advanced microwave modelling software is used to study the measurement sensitivity, dynamic range, and other system characteristics like sub-surface depth resolution.
2013
Istituto per la Microelettronica e Microsistemi - IMM
Scanning microwave microscopy
S parameter
microwave imaging
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Utilizza questo identificativo per citare o creare un link a questo documento: https://hdl.handle.net/20.500.14243/204570
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