This paper discusses the use of Mg-Al spinel as a sensitive material suitable for application in humiditysensors. Mg-Al spinelthinfilms were deposited on a Si/SiO2 substrate by the radiofrequency technique, using a target of sintered MgAl2O4 powder. SEM and XPS measurements were performed in order to investigate their microstructure and surface composition. Electrical measurements were carried out in a suitable test chamber, where temperature and humidity were controlled. The electrical behaviour of our samples in the relative humidity range from 2% up to 98% was explored. Significant changes in resistance and good reversibility obtained without the need for heat cleaning are the most interesting results
Magnesium aluminium spinel thin film as a humidity sensor
A Bearzotti;
1992
Abstract
This paper discusses the use of Mg-Al spinel as a sensitive material suitable for application in humiditysensors. Mg-Al spinelthinfilms were deposited on a Si/SiO2 substrate by the radiofrequency technique, using a target of sintered MgAl2O4 powder. SEM and XPS measurements were performed in order to investigate their microstructure and surface composition. Electrical measurements were carried out in a suitable test chamber, where temperature and humidity were controlled. The electrical behaviour of our samples in the relative humidity range from 2% up to 98% was explored. Significant changes in resistance and good reversibility obtained without the need for heat cleaning are the most interesting resultsI documenti in IRIS sono protetti da copyright e tutti i diritti sono riservati, salvo diversa indicazione.
