We deposit thin epitaxial YBaCu2O3 films on SrTiO3 (100) substrates by pulsed laser deposition using a pulsed molecular oxygen flow. We study the oxygen pressure dependence of their growth and their surface morphology by means of reflection high energy electron diffraction (RHEED) and atomic force microscope (AFM). A new method to improve the oxygen reactivity is also proposed.
RHEED/AFM analysis of YBCO epitaxial thin films grown by laser MBE
IPallecchi;
1997
Abstract
We deposit thin epitaxial YBaCu2O3 films on SrTiO3 (100) substrates by pulsed laser deposition using a pulsed molecular oxygen flow. We study the oxygen pressure dependence of their growth and their surface morphology by means of reflection high energy electron diffraction (RHEED) and atomic force microscope (AFM). A new method to improve the oxygen reactivity is also proposed.File in questo prodotto:
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