An overview of the method of surface differential reflectivity (SDR) for the study of semiconductor surfaces is presented. This includes the principles of the technique, the experimental apparatus, and some theoretical considerations concerning the connection of SDR data with the microscopic properties of the surface. Experimental results are also presented as an example of the application of this spectroscopy to the study of semiconductor surfaces.
Surface differential reflectivity spectroscopy of semiconductor surfaces
Selci S;Cricenti;
1987
Abstract
An overview of the method of surface differential reflectivity (SDR) for the study of semiconductor surfaces is presented. This includes the principles of the technique, the experimental apparatus, and some theoretical considerations concerning the connection of SDR data with the microscopic properties of the surface. Experimental results are also presented as an example of the application of this spectroscopy to the study of semiconductor surfaces.File in questo prodotto:
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