Silicon is the most diffused material for microelectronic industry. We propose a thermo-electrical simulation of an integrated optical modulator realized by ion implantation in SOI wafer. This structure allows to obtain an easier integration with electronic devices.
Thermo-electro-optical analysis of modulator embedded in all-silicon structure
G Coppola;M Iodice
2005
Abstract
Silicon is the most diffused material for microelectronic industry. We propose a thermo-electrical simulation of an integrated optical modulator realized by ion implantation in SOI wafer. This structure allows to obtain an easier integration with electronic devices.File in questo prodotto:
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