When external-cavity diode lasers are used in dimensional metrology via optical interferometry, parasitic modes and background radiation deserve careful investigation. This paper gives the relevant measurement equation and explicit formulae for the excess phase of travelling fringes. Particular emphasis is given to potential errors in the measurement of the Si lattice parameter by combined x-ray and optical interferometry.
On the effect of broadband emission in external-cavity diode-laser interferometry
Galzerano;Gianluca;
2007
Abstract
When external-cavity diode lasers are used in dimensional metrology via optical interferometry, parasitic modes and background radiation deserve careful investigation. This paper gives the relevant measurement equation and explicit formulae for the excess phase of travelling fringes. Particular emphasis is given to potential errors in the measurement of the Si lattice parameter by combined x-ray and optical interferometry.File in questo prodotto:
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