The sensitivity to relative humidity ~RH! variations in the range 0%-90% of a platinum polyyne, namely poly-@1,4-dihexadecyloxy-2,5-diethynylbenzene-bis~triphenylphosphine! platinum~II!# ~Pt-P-HDOB! membrane was investigated by means of a surface acoustic wave ~SAW! based sensor. A thin film of polymeric membrane was spin deposited on the free surface of the device and the resulting acoustic velocity and attenuation perturbations allowed the acoustic characterization of the membrane by means of the perturbation theory. The SAW sensor was able to reveal even very low ~,10% RH! humidity conditions at room temperature, with high reproducibility, repeatability and stability.

Sensitivity of a platinum-polyyne-based sensor to low relative humidity and chemical vapors

Cinzia Caliendo;
2002

Abstract

The sensitivity to relative humidity ~RH! variations in the range 0%-90% of a platinum polyyne, namely poly-@1,4-dihexadecyloxy-2,5-diethynylbenzene-bis~triphenylphosphine! platinum~II!# ~Pt-P-HDOB! membrane was investigated by means of a surface acoustic wave ~SAW! based sensor. A thin film of polymeric membrane was spin deposited on the free surface of the device and the resulting acoustic velocity and attenuation perturbations allowed the acoustic characterization of the membrane by means of the perturbation theory. The SAW sensor was able to reveal even very low ~,10% RH! humidity conditions at room temperature, with high reproducibility, repeatability and stability.
2002
Istituto di Acustica e Sensoristica - IDASC - Sede Roma Tor Vergata
Inglese
80
25
4849
4851
3
http://dx.doi.org/10.1063/1.1489095
Sì, ma tipo non specificato
Sensors
Surface Acoustic Waves
Humidity
Sensitivity
electroacoustic devices
in the present paper the behavior of a Surface Acoustiv Wave sensor is described. A SAW delay line has been implemented on Si substrate covered by a SiO2 and ZnO films grown by reactive sputtering technique; the acoustic path was covered by spinning technique with a humidity sensitive membrane. the SAW phase velocity and propagation loss changes were measured for different humidity values and the sensor calibration curve was deduced. The real and imaginary parts of the complex shear modulus G* of the thin membrane were experimentally estimated from acoustic measurements of insertion loss and velocity developed at 0% RH on different polymer coated substrates (such as lithium niobate and quartz).
3
info:eu-repo/semantics/article
262
Caliendo, Cinzia; Fratoddi, Ilaria; Vittoria Russo, Maria
01 Contributo su Rivista::01.01 Articolo in rivista
none
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Utilizza questo identificativo per citare o creare un link a questo documento: https://hdl.handle.net/20.500.14243/213428
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