We describe the technology behind a platform for integrated optics based on liquid crystals. Design and technological issues are addressed and effective technological solutions are presented. The physical implementation of optical waveguides char- acterized by a practical and reproducible process based on preferential etching of crystalline silicon substrates are presented. Devices are manufactured by wet etch- ing a Si substrates first and then by thermally growing thick SiO2 cladding layer. A nematic liquid crystal is used as core of the waveguiding devices. Experimental results on polarizing properties and single mode propagation of infrared light are presented and discussed.
Photonic platform based on silicon and liquid crystals
Romeo Beccherelli;
2006
Abstract
We describe the technology behind a platform for integrated optics based on liquid crystals. Design and technological issues are addressed and effective technological solutions are presented. The physical implementation of optical waveguides char- acterized by a practical and reproducible process based on preferential etching of crystalline silicon substrates are presented. Devices are manufactured by wet etch- ing a Si substrates first and then by thermally growing thick SiO2 cladding layer. A nematic liquid crystal is used as core of the waveguiding devices. Experimental results on polarizing properties and single mode propagation of infrared light are presented and discussed.I documenti in IRIS sono protetti da copyright e tutti i diritti sono riservati, salvo diversa indicazione.
