We report preliminary results on the synthesis of nanocrystalline thin films by cluster beam deposition. Clusters of refractory metals and alloys are produced by a Pulsed Are Cluster Ion Source. We have characterizaed the beam by mass spectrometry. Nanocrystalline TiO2 and nickel-titanium films have been produced and characterized. A structure based on particles of several nanometers of diameters is observed.
Deposition of nanocrystalline metal films by cluster beams produced by a pulsed arc cluster ion source
S Iannotta
1997
Abstract
We report preliminary results on the synthesis of nanocrystalline thin films by cluster beam deposition. Clusters of refractory metals and alloys are produced by a Pulsed Are Cluster Ion Source. We have characterizaed the beam by mass spectrometry. Nanocrystalline TiO2 and nickel-titanium films have been produced and characterized. A structure based on particles of several nanometers of diameters is observed.File in questo prodotto:
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