In this paper the realization and the characterization of a new kind of resonant cavity enhanced photodetector (RCE), fully compatible with silicon microelectronic technologies and working at 1.55 ?m, are reported. © 2010 Springer Science+Business Media B.V.

Fabrication and characterization of a silicon photodetector at 1.55 micron

Casalino;
2010

Abstract

In this paper the realization and the characterization of a new kind of resonant cavity enhanced photodetector (RCE), fully compatible with silicon microelectronic technologies and working at 1.55 ?m, are reported. © 2010 Springer Science+Business Media B.V.
2010
Istituto per la Microelettronica e Microsistemi - IMM
1.55 microns
Fully compatible
Resonant cavity enhanced photodetectors
Silicon microelectronics
Silicon photo-detector
Microelectronics
Microsystems
Optoelectronic devices
Sensors
Photodetectors
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Utilizza questo identificativo per citare o creare un link a questo documento: https://hdl.handle.net/20.500.14243/217742
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