In the present work the interaction of Zn-Tetraphenylporphyrins with chemically different volatile compounds are reported, in order to create Thickness-Share-Mode-Resonators (TSMRs) with optimal thickness for sensing response. Previous results showed isotherm curves typical for each chemical compound, thus demonstrating the selectivity of the used Zn-Porphyrins. However, other parameters are expected to contribute to the isotherm shape, such as the coating porosity, roughness and thickness. In this paper, the behaviour of TSMR sensors prepared with different amounts of the same coating has been investigated. Results indicate a strong correlation between sensor properties and deposition parameters opening the way to optimised sensor fabrication.

Chemical sensors based on TSMRS: effect of coating thickness

Macagnano A;
2004

Abstract

In the present work the interaction of Zn-Tetraphenylporphyrins with chemically different volatile compounds are reported, in order to create Thickness-Share-Mode-Resonators (TSMRs) with optimal thickness for sensing response. Previous results showed isotherm curves typical for each chemical compound, thus demonstrating the selectivity of the used Zn-Porphyrins. However, other parameters are expected to contribute to the isotherm shape, such as the coating porosity, roughness and thickness. In this paper, the behaviour of TSMR sensors prepared with different amounts of the same coating has been investigated. Results indicate a strong correlation between sensor properties and deposition parameters opening the way to optimised sensor fabrication.
2004
Istituto per la Microelettronica e Microsistemi - IMM
981-238-747-1
File in questo prodotto:
Non ci sono file associati a questo prodotto.

I documenti in IRIS sono protetti da copyright e tutti i diritti sono riservati, salvo diversa indicazione.

Utilizza questo identificativo per citare o creare un link a questo documento: https://hdl.handle.net/20.500.14243/220902
Citazioni
  • ???jsp.display-item.citation.pmc??? ND
  • Scopus ND
  • ???jsp.display-item.citation.isi??? 0
social impact