Grazing-incidence small-angle X-ray scattering has become a widely used technique for the morphological analysis of surface systems. Here it is show how this technique can be applied to a buried system, like metallic clusters in glass obtained by ion implantation. The optimization of the data-collection geometry is described as well as the details of the quantitative data analysis. An experimental example on Cu+Au-implanted glasses shows the potentiality of the technique.
On the use of grazing-incidence small-angle X-ray scattering (GISAXS) in the morphological study of ion-implanted materials
F d'Acapito;C Maurizio;C Mondelli;
2004
Abstract
Grazing-incidence small-angle X-ray scattering has become a widely used technique for the morphological analysis of surface systems. Here it is show how this technique can be applied to a buried system, like metallic clusters in glass obtained by ion implantation. The optimization of the data-collection geometry is described as well as the details of the quantitative data analysis. An experimental example on Cu+Au-implanted glasses shows the potentiality of the technique.File in questo prodotto:
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