ZnO nanostructures are widely employed in micro and nano devices, such as light emitting or laser diodes, field effect transistors, piezoelectric devices and many others. A nanostructures top down integration approach enables VLSI production scaling up since, in principle, more compatible with standard IC fabrication. In this view, a novel H2S MEMS based sensor that integrates a nanostructured ZnO film has a great potential in this field [1,2]. The integration of nanotetrapods on a thin membrane allows for increasing the sensing performance, and obtaining a detection of H2S gas at the ppb order with a much faster response than that of standard sensors [3,4]. In this work a micro hot plate on a suspended Si3N4 membrane embedding a nanostuctured film of TPs (Tetrapods) was developed.
Integration of ZnO nano-tetrapods onto a micro hot plate structure for H2S sensing
Cocuzza Matteo;Marasso Simone;Zappettini Andrea;Mosca Roberto;Calestani Davide;
2012
Abstract
ZnO nanostructures are widely employed in micro and nano devices, such as light emitting or laser diodes, field effect transistors, piezoelectric devices and many others. A nanostructures top down integration approach enables VLSI production scaling up since, in principle, more compatible with standard IC fabrication. In this view, a novel H2S MEMS based sensor that integrates a nanostructured ZnO film has a great potential in this field [1,2]. The integration of nanotetrapods on a thin membrane allows for increasing the sensing performance, and obtaining a detection of H2S gas at the ppb order with a much faster response than that of standard sensors [3,4]. In this work a micro hot plate on a suspended Si3N4 membrane embedding a nanostuctured film of TPs (Tetrapods) was developed.I documenti in IRIS sono protetti da copyright e tutti i diritti sono riservati, salvo diversa indicazione.
