We report on the pulsed laser deposition (PLD )of thin films of chalcogenide and tellurite glasses doped with RE ions. The depositions were performed in vacuum, for chalcogenide films,and in a low oxygen pressure for the tellurite films by using an excimer laser. bAfter the deposition,the morphological, structural, optical and spectroscopical characteristics are analysed by different techniques: Scanning Electron Microscopy (SEM ),X-ray Diffraction (XRD ),Rutherford Backscattering Spectrometry (RBS ),optical profilometry, m-lines spectroscopy, photoluminescence etc. The experimental results demonstrated that PLD is a suitable technique for the realisation of films of complex materials for optoelectronic and photonic applications
Pulsed laser deposition of active waveguides
Ferrari M;
2003
Abstract
We report on the pulsed laser deposition (PLD )of thin films of chalcogenide and tellurite glasses doped with RE ions. The depositions were performed in vacuum, for chalcogenide films,and in a low oxygen pressure for the tellurite films by using an excimer laser. bAfter the deposition,the morphological, structural, optical and spectroscopical characteristics are analysed by different techniques: Scanning Electron Microscopy (SEM ),X-ray Diffraction (XRD ),Rutherford Backscattering Spectrometry (RBS ),optical profilometry, m-lines spectroscopy, photoluminescence etc. The experimental results demonstrated that PLD is a suitable technique for the realisation of films of complex materials for optoelectronic and photonic applicationsI documenti in IRIS sono protetti da copyright e tutti i diritti sono riservati, salvo diversa indicazione.