KING A computer code for the simulation of ion-implantation in crystalline silicon In brief KING is a computer code, based on the Monte-Carlo binary collision approximation (MC-BCA) method (the same used in other popular programs such as TRIM/SRIM, or MARLOWE), for the 1D simulation of ion implantation in crystalline silicon. It was developed by G. Lulli and E. Albertazzi at the Institute for Microelectronics and Microsystems (IMM), Section of Bologna, of the Consiglio Nazionale delle Ricerche (CNR). KING can simulate the implantation of many elemental species, typically used in beam processing of silicon for microelectronics applications. For some most common dopants (B, As, P, In) the stopping and damage parameters have been tuned through the comparison with experimental results. KING is freely distributed as a binary executable compiled with PGI7.1 Fotran for the Linux i386 (32-bit) architecture, running on i386 64-bit processors too. If anyone is interested in a version compiled for 64-bit (but not compatible with 32-bit !), please contact G. Lulli. Consider, however, that there is no practical advantage in 64-bit compilation as concerns either efficiency or accuracy of the simulation. There is no version (and probably there will never be...) for the Windows - Mac platforms. Others MC-BCA codes, developed at CNR-IMM Bologna both for the simulation of ion implantation and for the simulation of Rutherford Backscattering-Channeling (RBS-C) spectra, are briefly described here. They have not been distributed so far, maybe they will be in the future. Please contact me if you are interested in calculations which can be performed with these programs. The KING code is dedicated to the memory of A. M. Mazzone, who passed away on August 8, 2007 after a lengthy illness. Her pioneering research in the field of the computer simulation of ion-matter interactions, which in late 80's originated the code KNIGHT, was the starting point of our work and of the development of KING. Page mantained by Giorgio Lulli; last update: November 21, 2007
KING
Lulli G;Albertazzi E
2007
Abstract
KING A computer code for the simulation of ion-implantation in crystalline silicon In brief KING is a computer code, based on the Monte-Carlo binary collision approximation (MC-BCA) method (the same used in other popular programs such as TRIM/SRIM, or MARLOWE), for the 1D simulation of ion implantation in crystalline silicon. It was developed by G. Lulli and E. Albertazzi at the Institute for Microelectronics and Microsystems (IMM), Section of Bologna, of the Consiglio Nazionale delle Ricerche (CNR). KING can simulate the implantation of many elemental species, typically used in beam processing of silicon for microelectronics applications. For some most common dopants (B, As, P, In) the stopping and damage parameters have been tuned through the comparison with experimental results. KING is freely distributed as a binary executable compiled with PGI7.1 Fotran for the Linux i386 (32-bit) architecture, running on i386 64-bit processors too. If anyone is interested in a version compiled for 64-bit (but not compatible with 32-bit !), please contact G. Lulli. Consider, however, that there is no practical advantage in 64-bit compilation as concerns either efficiency or accuracy of the simulation. There is no version (and probably there will never be...) for the Windows - Mac platforms. Others MC-BCA codes, developed at CNR-IMM Bologna both for the simulation of ion implantation and for the simulation of Rutherford Backscattering-Channeling (RBS-C) spectra, are briefly described here. They have not been distributed so far, maybe they will be in the future. Please contact me if you are interested in calculations which can be performed with these programs. The KING code is dedicated to the memory of A. M. Mazzone, who passed away on August 8, 2007 after a lengthy illness. Her pioneering research in the field of the computer simulation of ion-matter interactions, which in late 80's originated the code KNIGHT, was the starting point of our work and of the development of KING. Page mantained by Giorgio Lulli; last update: November 21, 2007I documenti in IRIS sono protetti da copyright e tutti i diritti sono riservati, salvo diversa indicazione.
