Gas sensors based on SnO2 films deposited by sol-gel on a Si substrate have been fabricated, characterised and tested. The results of structural characterisation and the sensing tests have shown the validity of this technological approach, which is a very promising step towards the full integration of the gas sensors in VLSI Si technology.
A SnO2 microsensor device for sub-ppm NO2 detection
G Leo;M Mazzer;R Rella;P Siciliano;S Capone;
1999
Abstract
Gas sensors based on SnO2 films deposited by sol-gel on a Si substrate have been fabricated, characterised and tested. The results of structural characterisation and the sensing tests have shown the validity of this technological approach, which is a very promising step towards the full integration of the gas sensors in VLSI Si technology.File in questo prodotto:
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