Interdigitated capacitors, meander and S-line inductors as well as a band-stop filter supported by micromachined thin dielectric membranes have been realized by our groups. Looking at the obtained results, the micromachining technology offers new perspectives in improving the performances of microwave and millimeter wave devices.
Micromachined Circuits for Microwave and Millimeter Wave Applications
R Marcelli;P De Gasperis;
1999
Abstract
Interdigitated capacitors, meander and S-line inductors as well as a band-stop filter supported by micromachined thin dielectric membranes have been realized by our groups. Looking at the obtained results, the micromachining technology offers new perspectives in improving the performances of microwave and millimeter wave devices.File in questo prodotto:
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