Two magnetron-sputtering devices have been numerically analyzed, experimentally validating the results. It has been inferred that a ferromagnetic yoke is not present in the first device, while the second one has a ferromagnetic yoke. It is shown that either the adding of the yoke, in the first case, or the removal of the yoke, in the second one, has limited effects in the magnetic configuration over the cathode. The same result has been obtained in a dummy case, where a parametric analysis considering devices with different sizes, with and without yoke, has been performed.
Equivalent Model of a Magnetron Sputtering Device with Ferromagnetic Yoke
Spolaore M
2012
Abstract
Two magnetron-sputtering devices have been numerically analyzed, experimentally validating the results. It has been inferred that a ferromagnetic yoke is not present in the first device, while the second one has a ferromagnetic yoke. It is shown that either the adding of the yoke, in the first case, or the removal of the yoke, in the second one, has limited effects in the magnetic configuration over the cathode. The same result has been obtained in a dummy case, where a parametric analysis considering devices with different sizes, with and without yoke, has been performed.File in questo prodotto:
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