MgAl2O4 thin films, deposited on Si/SiO2 substrates, were studied as humidity sensors. This paper discusses the evaluation of the chemical composition at increasing depths, carried out by a combination of Ar+ ion etching and XPS analysis. These analyses showed the simultaneous presence of Mg, Al and Si at the film/substrate interface. The thickness of the interfaces were calculated between 7 and 10 nm. The shift in the binding energies of the XPS peaks observed at the interface seems to demonstrate the occurrence of a chemical interaction between film and substrate. At the interface, Si 2p binding energy values are characteristic of a silicate, and this effect may be responsible for the good adhesive properties of MgAl2O4 films to silica, as demonstrated by peel tests with Scotch tape.
XPS analysis of the interface of ceramic thin films for humidity sensors
Guido Righini;
1993
Abstract
MgAl2O4 thin films, deposited on Si/SiO2 substrates, were studied as humidity sensors. This paper discusses the evaluation of the chemical composition at increasing depths, carried out by a combination of Ar+ ion etching and XPS analysis. These analyses showed the simultaneous presence of Mg, Al and Si at the film/substrate interface. The thickness of the interfaces were calculated between 7 and 10 nm. The shift in the binding energies of the XPS peaks observed at the interface seems to demonstrate the occurrence of a chemical interaction between film and substrate. At the interface, Si 2p binding energy values are characteristic of a silicate, and this effect may be responsible for the good adhesive properties of MgAl2O4 films to silica, as demonstrated by peel tests with Scotch tape.I documenti in IRIS sono protetti da copyright e tutti i diritti sono riservati, salvo diversa indicazione.
