A new integrated sensor for the acoustic particle velocity measurement is proposed. The device is based on a thermal principle and is made up of two polysilicon heaters placed over suspended dielectric membranes. The sensor is fabricated by means of a post-processing technique applied to chips designed with a commercial CMOS process. Preliminary measurements confirm the device suitability for acoustic applications.
Acoustic particle velocity sensors based on a thermal principle
M Piotto;
2012
Abstract
A new integrated sensor for the acoustic particle velocity measurement is proposed. The device is based on a thermal principle and is made up of two polysilicon heaters placed over suspended dielectric membranes. The sensor is fabricated by means of a post-processing technique applied to chips designed with a commercial CMOS process. Preliminary measurements confirm the device suitability for acoustic applications.File in questo prodotto:
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