Internal analyser inelastic scattering effects in XPS quantitative analysis

The shape of spectrum in XPS depends on processes in the sample and on the properties of measurements systems. Noise, electron energy analyser resolution, electron inelastic scattering in the sample and analyser, and non-monochromatic radiation produce a quality reduction of spectrum for quantitative analysis. The undesired scattering of electrons on the outer hemisphere of the analyser or into the lens system leads to spectral background shape distortion and difficulties in the analysis of intensity transmission and resolution functions. A new mathematic procedure, based on deconvolution method, for evaluation and removing instrumental artefact is proposed.