This paper describes an integrated microstructure used to control temperature in a gas sensor system. An innovative technological approach has been pursued to integrate gas sensors on silicon substrate, compatible with IC fabrication. A mixed analog-digital electronic interface controls temperature operation, to maximize the sensitivity to substances to be detected.
An integrated microstructure with temperature control for gas sensors
Maccagnani P;
1997
Abstract
This paper describes an integrated microstructure used to control temperature in a gas sensor system. An innovative technological approach has been pursued to integrate gas sensors on silicon substrate, compatible with IC fabrication. A mixed analog-digital electronic interface controls temperature operation, to maximize the sensitivity to substances to be detected.File in questo prodotto:
Non ci sono file associati a questo prodotto.
I documenti in IRIS sono protetti da copyright e tutti i diritti sono riservati, salvo diversa indicazione.
