Results of thermal characterization, based on photoacoustic measurements, of porous silicon layers and membranes are presented. Thermal conductivity values in good agreement with the values found in literature have been obtained, corfirming the usefulness and reliability of photothermal methods in the investigation of new materials for sensors and microsystems.
Photoacoustic evaluation of the thermal properties of porous silicon
Maccagnani P;
1999
Abstract
Results of thermal characterization, based on photoacoustic measurements, of porous silicon layers and membranes are presented. Thermal conductivity values in good agreement with the values found in literature have been obtained, corfirming the usefulness and reliability of photothermal methods in the investigation of new materials for sensors and microsystems.File in questo prodotto:
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