A new configuration of a double folded double slot CPW feed micromachined antenna array was realized on a 1.5 um thin three-layer dielectric membrane fabricated on a silicon substrate. The antenna was designed for an operating frequency of 38 GHz, and the double folded configuration was used for minimizing the membrane extension.
38 GHz Antennas on Micromachined Silicon Substrates
R Marcelli;
2001
Abstract
A new configuration of a double folded double slot CPW feed micromachined antenna array was realized on a 1.5 um thin three-layer dielectric membrane fabricated on a silicon substrate. The antenna was designed for an operating frequency of 38 GHz, and the double folded configuration was used for minimizing the membrane extension.File in questo prodotto:
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