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A frequency tunable magnetostatic wave (MSW) straight edge resonator (SER) made by a YIG film has been used as a selective frequency component in a micromachined resonating filter. S-parameters have been measured at different DC magnetic bias fields, with a frequency tunability between 2 GHz and 6 GHz ca.. An improvement of the performances for the SERs excited by micromachined microstrip transducers has been clearly demonstrated. Moreover, the utilization of silicon membranes to support MSW-SERs offers important openings toward the integration of magnetostatic wave devices with micromachined structures.

Magnetostatic Straight Edge Resonators on Micromachined Silicon Membrane

R Marcelli
2001

Abstract

A frequency tunable magnetostatic wave (MSW) straight edge resonator (SER) made by a YIG film has been used as a selective frequency component in a micromachined resonating filter. S-parameters have been measured at different DC magnetic bias fields, with a frequency tunability between 2 GHz and 6 GHz ca.. An improvement of the performances for the SERs excited by micromachined microstrip transducers has been clearly demonstrated. Moreover, the utilization of silicon membranes to support MSW-SERs offers important openings toward the integration of magnetostatic wave devices with micromachined structures.
2001
Istituto per la Microelettronica e Microsistemi - IMM
Inglese
Editor(s): Henry Helvajian; Siegfried W. Janson and Franz Laermer
Proceedings of the 2001 SPIE Symposium on MEMS Components and Applications for Industry, Automobiles, Aerospace, and Communication
2001 SPIE Symposium on MEMS Components and Applications for Industry, Automobiles, Aerospace, and Communication
4559
178
181
4
9780819442871
http://proceedings.spiedigitallibrary.org/proceeding.aspx?articleid=899976
SPIE, The International Society for Optical Engineering
BELLINGHAM
STATI UNITI D'AMERICA
Sì, ma tipo non specificato
22-23 October 2001
San Francisco, CA, USA
Micromachining
Magnetostatic Waves
Resonators
2-s2.0-0035767678
WOS:000172924600024
2
none
Sajin, G; Marcelli, R
273
info:eu-repo/semantics/conferenceObject
04 Contributo in convegno::04.01 Contributo in Atti di convegno
04.01 Contributo in Atti di convegno
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Utilizza questo identificativo per citare o creare un link a questo documento: https://hdl.handle.net/20.500.14243/238003
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