New configurations of double slot CPW feed micromachined antenna arrays were realized on a 1.5 ?m thin three-layer dielectric membrane fabricated on Si and GaAs substrates. The antennas were designed for 38 GHz operating frequency

Design, manufacturing and Characterization of Membrane supported Antennas for 38 GHz Wireless Applications

R Marcelli;
2001

Abstract

New configurations of double slot CPW feed micromachined antenna arrays were realized on a 1.5 ?m thin three-layer dielectric membrane fabricated on Si and GaAs substrates. The antennas were designed for 38 GHz operating frequency
2001
Istituto per la Microelettronica e Microsistemi - IMM
0-7803-6666-2
Micromachining
Antennas
Millimeter Waves
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Utilizza questo identificativo per citare o creare un link a questo documento: https://hdl.handle.net/20.500.14243/238006
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