The paper presents the design, realisation and experiments of MSW launchers and detectors made on silicon wafers and silicon membranes. S parameters measurement on ferrite unloaded and on magnetised ferrite loaded structures demonstrates the feasibility of such transducer. Using the silicon membranes to support these devices offers the advantage of miniaturisation, with important openings toward microwave circuit integration on semiconductor substrate
Magnetostatic Wave Transducers on Silicon Wafers and on Silicon Membranes
R Marcelli
1998
Abstract
The paper presents the design, realisation and experiments of MSW launchers and detectors made on silicon wafers and silicon membranes. S parameters measurement on ferrite unloaded and on magnetised ferrite loaded structures demonstrates the feasibility of such transducer. Using the silicon membranes to support these devices offers the advantage of miniaturisation, with important openings toward microwave circuit integration on semiconductor substrateFile in questo prodotto:
Non ci sono file associati a questo prodotto.
I documenti in IRIS sono protetti da copyright e tutti i diritti sono riservati, salvo diversa indicazione.
