A 1.5 ?m thin SiO2/Si3N4/SiO 2 membrane was manufactured on ?100? Silicon substrate. Also a 10-20 ?m thin GaAs membrane was manufactured using a new etching solution. Both types of membranes are destined to be used as support for microwave circuits; this has as effect a major improvement of circuits' performances
Dielectric and Semiconductor Membranes as Support for Microwave Circuits
R Marcelli;
1997
Abstract
A 1.5 ?m thin SiO2/Si3N4/SiO 2 membrane was manufactured on ?100? Silicon substrate. Also a 10-20 ?m thin GaAs membrane was manufactured using a new etching solution. Both types of membranes are destined to be used as support for microwave circuits; this has as effect a major improvement of circuits' performancesFile in questo prodotto:
Non ci sono file associati a questo prodotto.
I documenti in IRIS sono protetti da copyright e tutti i diritti sono riservati, salvo diversa indicazione.
