We describe the system for SiC epitaxial deposition and its parts. A section is be devoted to the procedures for system use. In the appendix there are the safety data sheets for the reagents used.
Silicon carbide reactor
G Attolini;M Bosi;
2012
Abstract
We describe the system for SiC epitaxial deposition and its parts. A section is be devoted to the procedures for system use. In the appendix there are the safety data sheets for the reagents used.File in questo prodotto:
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