The use of a simplified version of the liquid mirror approach to validate absolute planarity reference flats is described in detail. It is shown that the approach can serve the purpose, providing a measurement of the peak-to-valley departure from planarity that in experiments is within 7 nm uncertainty (2ó) over a diameter of 90 mm
Validation of absolute planarity reference plates with a liquid mirror
Maurizio Vannoni;Giuseppe Molesini
2005
Abstract
The use of a simplified version of the liquid mirror approach to validate absolute planarity reference flats is described in detail. It is shown that the approach can serve the purpose, providing a measurement of the peak-to-valley departure from planarity that in experiments is within 7 nm uncertainty (2ó) over a diameter of 90 mmFile in questo prodotto:
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