Vibrational polaritons in thin oxide and nitride films

Angular dependencies of infrared reflectivity spectra of thin silicon oxinitride amorphous films on silicon and porous aluminum oxide films on aluminum had been measured. These spectra show vibrational bands and strong interference bands allowing film thickness and dielectric function calculation and providing useful information on the bonding struc-ture of the coatings. Angular dependencies of these bands give the dispersion of vibrational and interference polariton modes in the films. The intersection of vibrational and interference polaritons has been observed for silicon oxinitride film.