Energy harvesting at low frequency is a challenge for microelectromechanical systems. In this work we present a piezoelectric vibration energy harvester based on freestanding molybdenum Mo and aluminum nitride AlN ring-microelectromechanical-system RMEMS resonators. The freestanding ring layout has high energy efficiency due to the additional torsional modes which are absent in planar cantilevers systems. The realized RMEMS prototypes show very low resonance frequencies without adding proof masses, providing the record high power density of 30.20 W mm-3 at 64 Hz with an acceleration of 2g. The power density refers to the volume of the vibrating RMEMS layout.
Freestanding piezoelectric rings for high efficiency energy harvesting at low frequency
De Vittorio M;Passaseo A
2011
Abstract
Energy harvesting at low frequency is a challenge for microelectromechanical systems. In this work we present a piezoelectric vibration energy harvester based on freestanding molybdenum Mo and aluminum nitride AlN ring-microelectromechanical-system RMEMS resonators. The freestanding ring layout has high energy efficiency due to the additional torsional modes which are absent in planar cantilevers systems. The realized RMEMS prototypes show very low resonance frequencies without adding proof masses, providing the record high power density of 30.20 W mm-3 at 64 Hz with an acceleration of 2g. The power density refers to the volume of the vibrating RMEMS layout.I documenti in IRIS sono protetti da copyright e tutti i diritti sono riservati, salvo diversa indicazione.