The deposition of 1 ML of As on Si(0 0 1)-(2 × 1) surface and the heteroepitaxial Ge/As/Si(0 0 1)-(2 × 1) growth were studied by using high resolution core-level spectroscopy and transmission electron microscopy (TEM). From the spectral decomposition of the Si2p core levels, collected on the Ge/Si interfaces obtained by codepositing As and Ge atoms at different Ge thickness, we identify the contribution of different Si layers to the Si2p lineshape, in agreement with recent theoretical final-state pseudopotential calculations. The bulk-like Ge3d core levels reflected the occurrence of a complete Ge-As site-exchange process, while the pseudomorphic layer-by-layer Ge/Si growth was confirmed by TEM investigation. © 2001 Elsevier Science B.V.

High resolution photoemission core level spectroscopy study and TEM analysis of the Ge/As/Si(0 0 1) growth

De Padova;Pa;Larciprete;Quaresima;Ferrari;La;Perfetti;Pa;
2001

Abstract

The deposition of 1 ML of As on Si(0 0 1)-(2 × 1) surface and the heteroepitaxial Ge/As/Si(0 0 1)-(2 × 1) growth were studied by using high resolution core-level spectroscopy and transmission electron microscopy (TEM). From the spectral decomposition of the Si2p core levels, collected on the Ge/Si interfaces obtained by codepositing As and Ge atoms at different Ge thickness, we identify the contribution of different Si layers to the Si2p lineshape, in agreement with recent theoretical final-state pseudopotential calculations. The bulk-like Ge3d core levels reflected the occurrence of a complete Ge-As site-exchange process, while the pseudomorphic layer-by-layer Ge/Si growth was confirmed by TEM investigation. © 2001 Elsevier Science B.V.
2001
Arsenic
Computational methods
Decomposition
Epitaxial growth
Interfaces (materials)
Photoemission
Semiconducting germanium
Semiconducting silicon
Semiconductor growth
Transmission electron microscopy
Heteroepitaxial growth
High resolution photoemission core level spectroscopy
Semiconductor materials
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Utilizza questo identificativo per citare o creare un link a questo documento: https://hdl.handle.net/20.500.14243/243767
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