The adsorption of three monolayers (3 MLs) of Sb at -120 °C on the Si(001)c(4×2) surface and the subsequent annealing up to 650 °C were followed by high resolution core level spectroscopy and RHEED analysis. By relating the electron diffraction patterns to the Si2p and Sb4d core level spectra measured after each annealing cycle, it was possible to monitor the evolution of the Sb/Si interface structure up to the achievement of a diffuse (2×1) reconstruction. Even after the annealing to 650 °C, the quality of the surface reconstruction remained poor, as attested by the RHEED pattern, by the intensity of the Si2p surface component and by the broadening of the Sb4d lineshape.

Temperature effect on the reconstruction of Sb/Si(001) interface studied by high resolution core level spectroscopy and RHEED analysis

Larciprete R;Quaresima C;Perfetti;
2000

Abstract

The adsorption of three monolayers (3 MLs) of Sb at -120 °C on the Si(001)c(4×2) surface and the subsequent annealing up to 650 °C were followed by high resolution core level spectroscopy and RHEED analysis. By relating the electron diffraction patterns to the Si2p and Sb4d core level spectra measured after each annealing cycle, it was possible to monitor the evolution of the Sb/Si interface structure up to the achievement of a diffuse (2×1) reconstruction. Even after the annealing to 650 °C, the quality of the surface reconstruction remained poor, as attested by the RHEED pattern, by the intensity of the Si2p surface component and by the broadening of the Sb4d lineshape.
2000
Adsorption
Annealing
Electron diffraction
Interfaces (materials)
Monolayers
Reflection high energy electron diffraction
Semiconducting antimony
Semiconducting silicon
Spectroscopic analysis
High resolution core level spectroscopy
Semiconducting films
File in questo prodotto:
Non ci sono file associati a questo prodotto.

I documenti in IRIS sono protetti da copyright e tutti i diritti sono riservati, salvo diversa indicazione.

Utilizza questo identificativo per citare o creare un link a questo documento: https://hdl.handle.net/20.500.14243/243775
Citazioni
  • ???jsp.display-item.citation.pmc??? ND
  • Scopus 1
  • ???jsp.display-item.citation.isi??? ND
social impact