Shape memory alloys (SMAs) can be considered a good candidate for actuation applications in the current micro-technology field. In the micro-scale, the temporal response of the SMA actuators can be improved, because of faster cooling during the austenite-martensite transformation. One of the most investigated geometries for this purpose has been the snake-like arrangement, which allows high strokes with considerable forces to be obtained. In this work, SMA elements for micro-actuators were patterned by laser machining in a snake-like shape. Subsequent surface chemical etching was adopted to improve the functional properties of the micro-elements. Calorimetric analysis and thermo-mechanical response of 90 ?m thick SMA elements were reported for the evaluation of their functional performances. Moreover, the effect of post-thermal treatment and grain orientation were also evaluated on the final performances. © 2014 ASM International.

Functional response of NiTi elements for smart micro-actuation applications

Biffi CA;Nespoli A;Villa E;Tuissi A
2014

Abstract

Shape memory alloys (SMAs) can be considered a good candidate for actuation applications in the current micro-technology field. In the micro-scale, the temporal response of the SMA actuators can be improved, because of faster cooling during the austenite-martensite transformation. One of the most investigated geometries for this purpose has been the snake-like arrangement, which allows high strokes with considerable forces to be obtained. In this work, SMA elements for micro-actuators were patterned by laser machining in a snake-like shape. Subsequent surface chemical etching was adopted to improve the functional properties of the micro-elements. Calorimetric analysis and thermo-mechanical response of 90 ?m thick SMA elements were reported for the evaluation of their functional performances. Moreover, the effect of post-thermal treatment and grain orientation were also evaluated on the final performances. © 2014 ASM International.
2014
Istituto di Chimica della Materia Condensata e di Tecnologie per l'Energia - ICMATE
advanced characterization
intermetallics
mechanical testing
non-ferrous metals
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Utilizza questo identificativo per citare o creare un link a questo documento: https://hdl.handle.net/20.500.14243/251275
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