Ta2O5 thin films were prepared by spin-coating methanol solutions of Ta chloromethoxide. It was prepared by reacting TaCl5 with methanol, followed by water addition (H2O: Ta molar ratio was 16). Thin films were deposited by spin-coating onto SiO2/Si substrates, followed by drying at 90 degrees C and heat-treatment up to 700 degrees C. The films were characterized by X-ray diffraction, transmission electron microscopy and field emission scanning electron microscopy. Crystallization was obtained only after heating at 700 degrees C, in the Ta2O5 orthorhombic phase. The resulting films had a thickness of 100 nm. Their structure was constituted by porous crystals with size up to 50 nm, while the pores had a size of about 10 nm. The results demonstrated that TaCl5 is very convenient precursor for the wet chemical synthesis of Ta2O5 thin films. (C) 2013 Elsevier B.V. All rights reserved.
Soft chemistry routes to transparent metal oxide thin films. The case of sol-gel synthesis and structural characterization of Ta2O5 thin films from tantalum chloromethoxide
Epifani Mauro;Pace Giovanni Battista;Siciliano Pietro;
2014
Abstract
Ta2O5 thin films were prepared by spin-coating methanol solutions of Ta chloromethoxide. It was prepared by reacting TaCl5 with methanol, followed by water addition (H2O: Ta molar ratio was 16). Thin films were deposited by spin-coating onto SiO2/Si substrates, followed by drying at 90 degrees C and heat-treatment up to 700 degrees C. The films were characterized by X-ray diffraction, transmission electron microscopy and field emission scanning electron microscopy. Crystallization was obtained only after heating at 700 degrees C, in the Ta2O5 orthorhombic phase. The resulting films had a thickness of 100 nm. Their structure was constituted by porous crystals with size up to 50 nm, while the pores had a size of about 10 nm. The results demonstrated that TaCl5 is very convenient precursor for the wet chemical synthesis of Ta2O5 thin films. (C) 2013 Elsevier B.V. All rights reserved.I documenti in IRIS sono protetti da copyright e tutti i diritti sono riservati, salvo diversa indicazione.
