The use of Molybdenum is of interest in various technological areas. Because of its remarkable properties (high melting point (2610°C), high conductivity, good chemical stability and high hardness), Mo coatings have been used in microelectronics (gates for MOS integrated circuits, interconnections, and diffusion barriers), as back contacts for solar cells and they are suitable candidates to fabricate superconducting microcalorimeters for high-performance radiation detectors. Moreover Molybdenum films are used in nuclear energy applications and for missile and aircraft parts. As a consequence of their appeal, a variety of deposition techniques and conditions has been employed to obtain Mo coatings.Nonetheless, a detailed study of the process-structure-properties for Mo-based coatings is still lacking in the literature.In this work, we present an investigation, based on the use of high resolution characterization methodologies, on the properties of Mo deposited by sputtering on titanium substrates. Different films have been grown under different sputtering conditions to find a correlation between a variety of deposition parameters and the intrinsic properties of the films. The working gas has been also changed (Ar, Xe, etc.) to evaluate its influence on the growing layer. Microstructural characterization activities consisted of scanning electron microscopy (SEM), X-ray diffraction (XRD) and focused ion beam (FIB) cross section analysis. The residual stress distribution was investigated by using an innovative high resolution focused ion beam micro-ring-core method. The nano-mechanical properties of the films (hardness and modulus) were analyzed by nanoindentation testing. Wear resistance and adhesion were finally analyzed by means of scratch and tribological tests, using a fully-computerized UMT tester. Results showed a significant modification of coatings' microstructure, depending on the adopted working gas and process parameters. In particular, a transition from a micro-crystalline columnar microstructure to a nano-porous microstructure was observed by using different kind of working gas. Modifications of the residual stress field and mechanical properties were also observed, as a function of the process parameters, and a correlation with observed adhesion and wear resistance is proposed.

Structural, Morphological and Mechanical Characterization of Mo Sputtered Coatings

SM Deambrosis;E Miorin;M Fabrizio;
2013

Abstract

The use of Molybdenum is of interest in various technological areas. Because of its remarkable properties (high melting point (2610°C), high conductivity, good chemical stability and high hardness), Mo coatings have been used in microelectronics (gates for MOS integrated circuits, interconnections, and diffusion barriers), as back contacts for solar cells and they are suitable candidates to fabricate superconducting microcalorimeters for high-performance radiation detectors. Moreover Molybdenum films are used in nuclear energy applications and for missile and aircraft parts. As a consequence of their appeal, a variety of deposition techniques and conditions has been employed to obtain Mo coatings.Nonetheless, a detailed study of the process-structure-properties for Mo-based coatings is still lacking in the literature.In this work, we present an investigation, based on the use of high resolution characterization methodologies, on the properties of Mo deposited by sputtering on titanium substrates. Different films have been grown under different sputtering conditions to find a correlation between a variety of deposition parameters and the intrinsic properties of the films. The working gas has been also changed (Ar, Xe, etc.) to evaluate its influence on the growing layer. Microstructural characterization activities consisted of scanning electron microscopy (SEM), X-ray diffraction (XRD) and focused ion beam (FIB) cross section analysis. The residual stress distribution was investigated by using an innovative high resolution focused ion beam micro-ring-core method. The nano-mechanical properties of the films (hardness and modulus) were analyzed by nanoindentation testing. Wear resistance and adhesion were finally analyzed by means of scratch and tribological tests, using a fully-computerized UMT tester. Results showed a significant modification of coatings' microstructure, depending on the adopted working gas and process parameters. In particular, a transition from a micro-crystalline columnar microstructure to a nano-porous microstructure was observed by using different kind of working gas. Modifications of the residual stress field and mechanical properties were also observed, as a function of the process parameters, and a correlation with observed adhesion and wear resistance is proposed.
2013
Istituto di Chimica della Materia Condensata e di Tecnologie per l'Energia - ICMATE
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Utilizza questo identificativo per citare o creare un link a questo documento: https://hdl.handle.net/20.500.14243/266659
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