Femtosecond laser micromachining is a powerful and versatile tool both for the fabrication of photonic and optofluidic devices and for material surface processing. The basics of the technique will be discussed and some examples of applications will be presented. In particular, an optofluidic device for sensing applications, together with silicon surface texturing for applications in the fields of photovoltaic cells and photodetectors are discussed. (C) 2013 Elsevier B.V. All rights reserved.

Femtosecond laser micromachining for optofluidic and energy applications

Osellame Roberto;Ramponi Roberta
2013

Abstract

Femtosecond laser micromachining is a powerful and versatile tool both for the fabrication of photonic and optofluidic devices and for material surface processing. The basics of the technique will be discussed and some examples of applications will be presented. In particular, an optofluidic device for sensing applications, together with silicon surface texturing for applications in the fields of photovoltaic cells and photodetectors are discussed. (C) 2013 Elsevier B.V. All rights reserved.
2013
Istituto di fotonica e nanotecnologie - IFN
Femtosecond micromachining
Optofluidics
Black silicon
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Utilizza questo identificativo per citare o creare un link a questo documento: https://hdl.handle.net/20.500.14243/269628
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