Femtosecond laser micromachining is a powerful and versatile tool both for the fabrication of photonic and optofluidic devices and for material surface processing. The basics of the technique will be discussed and some examples of applications will be presented. In particular, an optofluidic device for sensing applications, together with silicon surface texturing for applications in the fields of photovoltaic cells and photodetectors are discussed. (C) 2013 Elsevier B.V. All rights reserved.

Femtosecond laser micromachining for optofluidic and energy applications

Osellame Roberto;Ramponi Roberta
2013

Abstract

Femtosecond laser micromachining is a powerful and versatile tool both for the fabrication of photonic and optofluidic devices and for material surface processing. The basics of the technique will be discussed and some examples of applications will be presented. In particular, an optofluidic device for sensing applications, together with silicon surface texturing for applications in the fields of photovoltaic cells and photodetectors are discussed. (C) 2013 Elsevier B.V. All rights reserved.
2013
Istituto di fotonica e nanotecnologie - IFN
36
1
102
105
4
Femtosecond micromachining
Optofluidics
Black silicon
5
info:eu-repo/semantics/article
262
Lo Turco, Sara; Nava, Giorgio; Osellame, Roberto; Vishnubhatla Krishna, Chaitanya; Ramponi, Roberta
01 Contributo su Rivista::01.01 Articolo in rivista
none
File in questo prodotto:
Non ci sono file associati a questo prodotto.

I documenti in IRIS sono protetti da copyright e tutti i diritti sono riservati, salvo diversa indicazione.

Utilizza questo identificativo per citare o creare un link a questo documento: https://hdl.handle.net/20.500.14243/269628
Citazioni
  • ???jsp.display-item.citation.pmc??? ND
  • Scopus ND
  • ???jsp.display-item.citation.isi??? 6
social impact