Low energy silicon on insulator ion implanted gratings for optical wafer scale testing

One of the challenges that must be addressed when integrating a "photonic layer" onto a silicon microelectronic circuit is the development of a wafer scale optical testing technique, similar to that employed today in integrated electronics industrial manufacturing. This represents a critical step for the advancement of silicon photonics to large scale production technology with reduced costs.

Silicon photonics shows tremendous potential for the development of the next generation of ultra fast telecommunication, tera-scale computing, and integrated sensing applications.