Alumina is used as a dielectric in microelectronics. This work describes strategies employed to control the thickness and homogeneity of alumina deposited by spin on casting on silicon substrates. Different parameters (stabilizing additives, hydrolyzing solution and spin in velocity) have been used o widen the process window and control the thickness.
Control of Gelation during the deposition of Alumina Films
Watts;
2014
Abstract
Alumina is used as a dielectric in microelectronics. This work describes strategies employed to control the thickness and homogeneity of alumina deposited by spin on casting on silicon substrates. Different parameters (stabilizing additives, hydrolyzing solution and spin in velocity) have been used o widen the process window and control the thickness.File in questo prodotto:
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