This work proposes the realization of a thick multi-layer patterned structure using a photolithographic technique which combines two photopolymerization processes and two different wavelengths: UV and visible light. Multilayer structures are constructed by a simultaneous curing and bonding of layers of different materials after casting immiscible resins in one step and let them stratifying in the mold. The use of two different wavelengths allows the fabrication of patterned structures formed by two different materials, i.e. a siloxane acrylic layer superimposed and strongly adherent onto an epoxy layer. The optimization of the two reactions was done varying the photoinitiator systems, the irradiation time and selecting the right wavelength.

Blue and UV combined photolithographic polymerization for the patterning of thick structures

Cocuzza M;
2015

Abstract

This work proposes the realization of a thick multi-layer patterned structure using a photolithographic technique which combines two photopolymerization processes and two different wavelengths: UV and visible light. Multilayer structures are constructed by a simultaneous curing and bonding of layers of different materials after casting immiscible resins in one step and let them stratifying in the mold. The use of two different wavelengths allows the fabrication of patterned structures formed by two different materials, i.e. a siloxane acrylic layer superimposed and strongly adherent onto an epoxy layer. The optimization of the two reactions was done varying the photoinitiator systems, the irradiation time and selecting the right wavelength.
2015
Istituto dei Materiali per l'Elettronica ed il Magnetismo - IMEM
Lithography
Patterning
Photopolymerization
Visible light
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Utilizza questo identificativo per citare o creare un link a questo documento: https://hdl.handle.net/20.500.14243/273434
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