Application of compound matrices to the study of saw and psaw propagation in layered structures

It was demonstrated in [1], that the use of compound in the matrix formalism makes it possible to calculate mode velocities in a layered structure with thick film and is an useful tool to derive the analytic expressions for acoustic mode propagation. The advantages, as well as the points related to the use of compound matrices in matrix of solutions of acoustic equations in comparison to their matrices are discussed, when applied to calculations of and PSAW propagation in layered structures, exploiting films. Using an "imaginable" layered structure consisting of thick isotropic diamond film on the isotropic diamond , we illustrate and compare an "exponential" unstable resulting by the use of initial matrices and the stable calculated using their compound matrices. We report a of compound matrix properties that are required for implementation for acoustic wave analysis. Results of the performed exploiting the initial matrices and their ones are discussed and compared for the of SAW and propagation along a layered structure: an AlN film deposited on a thick isotropic diamond layer, , in turn, on an isotropic polycrystal Si. Calculated results for this structure and the layered structure with crystal substrate are discussed. © 2008 IEEE.