Zinc oxides (ZnO) nanowires were successfully deposited on plastic low-power micro-hotplates using the thermal oxidation technique. Metallic zinc layer was deposited on the sensing transducer by RF magnetron sputtering and then oxidized in a controlled atmosphere in order to obtain ZnO nanostructures. Morphological investigations confirmed the nanometric dimensions of the fabricated nanostructures. The n-type behavior of the nanostructured material was evaluated towards different chemical species to highlight the electrical properties of the materials. Calibration curves for the detection of several chemical species were defined. © 2012 The Authors. Published by Elsevier Ltd.
Zinc oxide nanowires deposited on polymeric hotplates for low-power gas sensors
Zappa Dario;Comini Elisabetta;Sberveglieri Giorgio
2012
Abstract
Zinc oxides (ZnO) nanowires were successfully deposited on plastic low-power micro-hotplates using the thermal oxidation technique. Metallic zinc layer was deposited on the sensing transducer by RF magnetron sputtering and then oxidized in a controlled atmosphere in order to obtain ZnO nanostructures. Morphological investigations confirmed the nanometric dimensions of the fabricated nanostructures. The n-type behavior of the nanostructured material was evaluated towards different chemical species to highlight the electrical properties of the materials. Calibration curves for the detection of several chemical species were defined. © 2012 The Authors. Published by Elsevier Ltd.I documenti in IRIS sono protetti da copyright e tutti i diritti sono riservati, salvo diversa indicazione.
