Oxygen inhibition lithography (OIL), an innovative photolithographic technology for the fabrication of multiscale and multipolymeric patterns and devices, is presented by A. Vitale, M. Quaglio, and co-workers on page 4560. Simultaneous control over pattern shape, dimensions, and composition is achieved exploiting the inhibitory effects of oxygen during UV curing in air. Multifunctional structures can be easily fabricated, precisely and concurrently tuning the surface topography and pattern functionality.

Oxygen-Inhibition Lithography for the Fabrication of Multipolymeric Structures

Cocuzza M;
2015

Abstract

Oxygen inhibition lithography (OIL), an innovative photolithographic technology for the fabrication of multiscale and multipolymeric patterns and devices, is presented by A. Vitale, M. Quaglio, and co-workers on page 4560. Simultaneous control over pattern shape, dimensions, and composition is achieved exploiting the inhibitory effects of oxygen during UV curing in air. Multifunctional structures can be easily fabricated, precisely and concurrently tuning the surface topography and pattern functionality.
2015
Istituto dei Materiali per l'Elettronica ed il Magnetismo - IMEM
lithography
oxygen inhibition
polymers
File in questo prodotto:
Non ci sono file associati a questo prodotto.

I documenti in IRIS sono protetti da copyright e tutti i diritti sono riservati, salvo diversa indicazione.

Utilizza questo identificativo per citare o creare un link a questo documento: https://hdl.handle.net/20.500.14243/302241
Citazioni
  • ???jsp.display-item.citation.pmc??? ND
  • Scopus 35
  • ???jsp.display-item.citation.isi??? 32
social impact