We report about the realization of a negative-tone photoresist for two-photon lithography containing superparamagnetic iron-oxide nanoparticles at 0.1 wt.% concentration. The material was characterized in terms of optical transparence in the visible spectral range and the microfabrication process engineered in order to minimize particles agglomeration. The versatility of two-photon direct laser writing allowed us to fabricate three-dimensional structures with sub-micrometer resolution, letting us envision possible applications of this nanocomposite blend for the realization of complex magnetically actuated MEMS.

Magnetically active polymeric nanocomposites for two-photon stereolithography

Quarta A;
2014

Abstract

We report about the realization of a negative-tone photoresist for two-photon lithography containing superparamagnetic iron-oxide nanoparticles at 0.1 wt.% concentration. The material was characterized in terms of optical transparence in the visible spectral range and the microfabrication process engineered in order to minimize particles agglomeration. The versatility of two-photon direct laser writing allowed us to fabricate three-dimensional structures with sub-micrometer resolution, letting us envision possible applications of this nanocomposite blend for the realization of complex magnetically actuated MEMS.
2014
lithography; magnetic; nanoparticle
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Utilizza questo identificativo per citare o creare un link a questo documento: https://hdl.handle.net/20.500.14243/311860
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