The capabilities of Photothermal Reflectance as a non destructive diagnostic tools for materials and devices properties is presented. The possibilities of performing thermal diffusivity measurements over restricted sample areas is presented. Mapping of the Photothermal Reflectance signal over a microelectronics device has enabled to obtain a photothermal image through which it is possible to diagnose both the device construction and operation.
Photothermal reflectance for non destructive testing in materials and devices
G Caruso;V Foglietti;A Bearzotti
1996
Abstract
The capabilities of Photothermal Reflectance as a non destructive diagnostic tools for materials and devices properties is presented. The possibilities of performing thermal diffusivity measurements over restricted sample areas is presented. Mapping of the Photothermal Reflectance signal over a microelectronics device has enabled to obtain a photothermal image through which it is possible to diagnose both the device construction and operation.File in questo prodotto:
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