Silicon is one of the best characterized materials thanks to its role for integrated circuit fabrication technology. It is also a relatively "strong" mechanical material with a modulus of elasticity similar to the steel. The absence of mechanical hystereis makes the silicon a very good candidate for development of high performance microsensors. It could be difficult to machine silicon with ordinary cutting tools, but taking advantage of the highly developed microelectronic technology the silicon can be chemically etched in various shapes and then fused together with bonding processes. Today silicon microsensors are reliable options in multitude of applications. These miniature devices offer the advantage to be combined with electrical and mechanical components using integrated circuit processing techniques.
Microelectromechanical systems: state of art and future trends
V Foglietti;A Bearzotti;
1995
Abstract
Silicon is one of the best characterized materials thanks to its role for integrated circuit fabrication technology. It is also a relatively "strong" mechanical material with a modulus of elasticity similar to the steel. The absence of mechanical hystereis makes the silicon a very good candidate for development of high performance microsensors. It could be difficult to machine silicon with ordinary cutting tools, but taking advantage of the highly developed microelectronic technology the silicon can be chemically etched in various shapes and then fused together with bonding processes. Today silicon microsensors are reliable options in multitude of applications. These miniature devices offer the advantage to be combined with electrical and mechanical components using integrated circuit processing techniques.I documenti in IRIS sono protetti da copyright e tutti i diritti sono riservati, salvo diversa indicazione.
